Specifications for GDQT High Vacuum SF6 Gas Recovery and Refilling Equipment

(1) Maximum gas storage pressure: 50bar.

(2) Recovery gas pressure: initial pressure ≤ 0.8MPa (20°C), final pressure ≤ 1mbar.

(3) Gas storage volume: 340L.

(4) Vacuuming speed : ≥ 60m3/h; ultimate vacuum:≤ 0.05Pa.

(5) Max running time(single): >96 hours

(6) Compressor system: adopts oil-free compressor, compressor recovery rate is 60m3/h (initial pressure 5bar state), output pressure ≥50bar.

(7) Using the metal hard sealing principle, the leakage rate of the joint connection system is less than 1*10-8 mbar l/sec.

(8) Vacuum degree maintenance of the device: When the vacuum degree reaches 133Pa, after shutting down for 30 minutes and maintaining it for 5 hours, the increase in vacuum degree of the device should not exceed 200Pa (calculation starts when the vacuum degree reaches 133Pa. Keep the vacuum pump running for at least 30 minutes, stop the pump and connect it with the pump Isolate, read the vacuum degree A after watching for 30 minutes. Then wait for more than 5 hours, and read the vacuum degree B. The rising value of the vacuum degree (B-A) ≤200Pa).

(9) Back-charging speed (20°C): Assume that the equipment volume is 1m3, the initial air pressure is less than 100Pa (<1mBar), the final pressure is 0.5MPa (5Bar), and the filling time does not exceed 30 minutes (i.e., the back-charging speed ≥ 60Kg /h.

(10) Quality control of gas purified:

① Humidity control: When the SF6 gas humidity of the gas source is 1000 μL/L., the gas humidity after one recovery process should be less than 80 μL/L; the moisture content of the final recovered SF6 gas should be less than 40 μL/L (ppm) after purification and drying.

② Oil content control: less than 5μg/g.

③ Dust control: particle size is less than 1 μm.

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